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Halocarbon 23 (CHF3): Used as a cleaning gas in the semiconductor industry and as a refrigerant. Purity ranges typically from
卤化碳 14(CF4):在半导体工业中广泛用作等离子蚀刻气体和制冷剂。纯度:99.999%。
锗(GeH4):用于半导体生产,尤其是锗薄膜的沉积。纯度:99.999%
二硅烷(SiH3)2:主要用于半导体工业的硅层外延生长。纯度:99.999%。
Dichlorosilane (SiH2Cl2): Used in the production of semiconductor materials and as a precursor for silicon deposition in chemical vapor deposition
Diborane is a chemical compound that consists of boron and hydrogen atoms and has a molecular formula B2H6. This substance
The chemical formula of chlorine is Cl2, which is a toxic gas. It is mainly used in high-tech fields such
Boron Trifluoride, BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas. Applications In the semiconductor industry, boron trifluoride is
Boron trichloride.BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. Atomic layer etch and pulsed plasma
Ammonia, a kind of inorganic substance with chemical formula of NH3 and molecular weight of 17.031, is colorless and has
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