Category: High Purity Electronic Gases

Boron Trifluoride, BF3, is a colourless, toxic, nonflammable, corrosive, high-pressure gas.   Applications In the semiconductor industry, boron trifluoride is used for: p-type diffusion in

Boron trichloride.BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. Atomic layer etch and pulsed plasma etch. BCl₃ is mainly used

Ammonia, a kind of inorganic substance with chemical formula of NH3 and molecular weight of 17.031, is colorless and has a strong irritating odor.  

Oxygen is a colorless, odorless, and tasteless gas. The relative density of gas (air=1) is 1.105 at 21.1℃ and 101.3kPa, and the density of liquid

Depending on its purity, nitrous oxide (often called “laughing gas”) is widely used in the food, medical, and semiconductor industries. Nitrous oxide may be used