Electronic Special Gases Services

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Block E, 18th Floor, No. 720 Pudong Avenue, Pudong New Area, Shanghai

Operating from our global manufacturing hub in China, we run a network of production plants strategically positioned to support all electronic manufacturing processes, providing a comprehensive range of special gases. Offering over 100 specialty gases and mixtures, we are the preferred and global choice for electronic special gases. Our extensive process knowledge ensures that our electronic gases meet your most stringent purity and consistency requirements.

Our network of electronic special gas production plants, located strategically in China and key manufacturing markets worldwide, ensures timely delivery and provides flexibility and security of supply.

Electronic special gases are shipped in various container sizes to meet your individual application needs. These include cylinders, ton tanks, tube trailers, and ISO containers.

Gas Formula Purity(%)
Ammonia NH3 5N~6N
Arsine AsH3 5N~6N
Boron trichloride BCl3 4N~5N
Boron trifluoride BF3 3N~5N
Chlorine Cl2 4N~5N
Diborane B2H6 2N~4N
Dichlorosilane SiH2Cl2 2N~3N
Disilane (SiH3)2 5N
Germane GeH4 5N
Germanium tetrafluoride GeF4 3N
Halocarbon 14 CF4 4N~5N
Halocarbon 23 CHF3 2N~5N
Halocarbon 32 CH2F2 3N
Halocarbon 116 C2F6 4N
Halocarbon 218 C3F8 4N~5N
Halocarbon c318 C4F8 4N
Hydrogen bromide HBr 5N
Helium He 4N~6N
Hydrogen fluoroide HF 4N
Methylsilane CH3SiH3 4N
Nitrogen trifluoride NF3 4N
Phosphine PH3 5N~6N
Silane SiH4 4N~6N
Silicon tertrachloride SiCl4 4N
Silicon tertrafluoride SiF4 4N
Sulfur dioxide SO2 4N
Sulfur hexafluoride SF6 3N~5N
Trichlorosilane SiHCl3 3N
Trimethylboron B(CH3)3 2N
Tungsten hexafluoride WF6 5N

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